Liu C.-H.Jywe W.-Y.Chen C.-K.Wen-Yuh Jywe2022-05-242022-05-242004https://www.scopus.com/inward/record.uri?eid=2-s2.0-8344284331&doi=10.1364%2fAO.43.005607&partnerID=40&md5=10cfd9ad0ef707dbc9be5d4796341cc4https://scholars.lib.ntu.edu.tw/handle/123456789/611997We propose a diffraction-type optical triangulation sensor based on the diffraction theorem and the laser triangulation method. The advantage of the proposed sensor is that it obtains not only the linear displacement of a moving object but also its three angular motion errors. The developed sensor is composed mainly of a laser source, two quadrant detectors, and a reflective diffraction grating. The reflective diffraction grating can reflect the incident laser beam into several diffractive rays, and two quadrant detectors were set up for detecting the position of 0- and + 1-order diffraction rays. According to the optical triangulation relationship between the spatial incident angles of a laser beam and the output coordinates of two quadrant detectors, the displacement and the three angular motion errors of a moving object can be obtained simultaneously. ? 2004 Optical Society of America.DemagnetizationDetectorsDiffraction gratingsKinematicsLaser beamsLight scatteringOptical beam splittersDiffractive raysLaser sourcesMotion errorsQuadrant detectorsOptical sensorsjournal article10.1364/AO.43.0056072-s2.0-8344284331