Structure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substrate

Ceh, MiranMiranCehChen, Hsing-ChaoHsing-ChaoChenChen, Miin-JangMiin-JangChenYang, Jer-RenJer-RenYangShiojiri, MakotoMakotoShiojiri2012-10-242018-06-282012-10-242018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/243934en-USStructure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substratejournal article10.2320/matertrans.MC200902http://ntur.lib.ntu.edu.tw/bitstream/246246/243934/-1/380.pdf