Synthesis and characterization of tris(β-ketoiminato)ruthenium(III) complexes: Potential precursors for CVD of Ru and RuO2 thin films

Chou, T.-Y.T.-Y.ChouLai, Y.-H.Y.-H.LaiChen, Y.-L.Y.-L.ChenChi, Y.Y.ChiPrasad, K.R.K.R.PrasadCarty, A.J.A.J.CartySHIE-MING PENGLee, G.-H.G.-H.Lee2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-3142761724&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/308154Synthesis and characterization of tris(β-ketoiminato)ruthenium(III) complexes: Potential precursors for CVD of Ru and RuO2 thin filmsjournal article10.1002/cvde.2003062842-s2.0-3142761724