國立臺灣大學應用力學研究所黃榮山2006-07-262018-06-292006-07-262018-06-292002-07-31http://ntur.lib.ntu.edu.tw//handle/246246/21658We report on a novel switchable corner micromirror for wide free-space optical applications. The corner mirror, composed of two mutually orthogonal reflective surfaces, may reflect incident light beam at any angle back to its incoming direction. In this report the corner micromirrors are able to be batch fabricated. Each micromachined corner mirror is constituted by three elements: a vertical mirror, a movable horizontal mirror, and a bottom electrode. Incorporated with a grating and other optical components, the new device may provide simultaneous wavelength selection in free space and switching function for wavelength as well as intensity. Thus, the corner micromirror may alleviate alignment problems and simplify assembly procedure.application/pdf1187484 bytesapplication/pdfzh-TW國立臺灣大學應用力學研究所光纖通訊應用之微光機電系統元件reporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/21658/1/902215E002031.pdf