CMOS-based Capacitive Micromachined Ultrasonic Transducers operating without external DC bias

Lin, F.-Y.F.-Y.LinTian, W.-C.W.-C.TianPAI-CHI LIWEI-CHENG TIAN2020-06-112020-06-112013https://scholars.lib.ntu.edu.tw/handle/123456789/497762[SDGs]SDG7CMOS-based Capacitive Micromachined Ultrasonic Transducers operating without external DC biasconference paper10.1109/ULTSYM.2013.03602-s2.0-84894361607https://www.scopus.com/inward/record.uri?eid=2-s2.0-84894361607&doi=10.1109%2fULTSYM.2013.0360&partnerID=40&md5=9147fe2fc764843add0e1ada044f3608