Design and Performance Verification of a Microscope Based Interferometer for Miniature Specimen Metrology

Lee, Chih-KungChih-KungLeeWu, Wen-JongWen-JongWuWu, Giin-YuanGiin-YuanWuLi, Chia-LingChia-LingLiChen, Zeng-DeZeng-DeChenChen, Jau-YuJau-YuChen2009-02-042018-06-292009-02-042018-06-292005-08http://ntur.lib.ntu.edu.tw//handle/246246/120154application/pdf447179 bytesapplication/pdfen-USDesign and Performance Verification of a Microscope Based Interferometer for Miniature Specimen Metrologyhttp://ntur.lib.ntu.edu.tw/bitstream/246246/120154/1/39.pdf