2018-08-012024-05-16https://scholars.lib.ntu.edu.tw/handle/123456789/668713摘要：近年來可撓性大面積感測技術在可攜式、穿戴式裝置以及機器人應用上日趨重要，本計畫目標即在研究可撓性主動式陣列放大電路，並與壓電感測元件整合，開發可撓性觸覺感測面系統。在為期三年的計畫中，首先將於50或100微米聚醯亞胺基板上開發可撓性氧化物電晶體放大電路，包含以n-型氧化鎂鋅或氧化鉿鋅薄膜電晶體所構成之pseudo-CMOS放大電路，以及由n-型氧化鋅與p-型氧化亞錫薄膜電晶體所構成之CMOS放大電路，其中電晶體、回饋電阻、電容等參數將利用SPICE電子電路模擬軟體來進行最佳化。第二年則是將第一年研究成果應用於5&#61620;5主動式陣列氧化物電晶體放大電路的開發，並透過貼合製程將此可撓放大電路陣列與聚偏氟乙烯高分子壓電薄膜結合，開發可撓性觸覺感測面系統；為達後續一體整合之目標，期間將同步研究低溫可撓氧化鋅/氮化鋁複合壓電感測元件。最後一年則著重於開發超薄可撓觸覺感測面系統，將5&#61620;5主動式陣列氧化物電晶體放大電路製作在塗佈於矽晶圓承載基材上之10微米以下超薄聚醯亞胺基板，接著將第二年度所開發之氧化鋅/氮化鋁複合壓電感測元件以真空濺鍍製程一體整合於放大電路上，最後利用剝離製程將其與矽晶圓分離，完成超薄可撓觸覺感測面系統之製作，並將研究此超薄可撓觸覺感測面於不同曲率下之特性與效能。<br> Abstract: With the advancement in flexible electronic technology, flexible large-area sensors have gradually shown their potential in wearable and ubiquitous devices and robotic applications. In this project, we plan to develop a flexible tactile sensing surface based on monolithic integration of flexible oxide-TFT-based active-matrix amplifier backplane and piezoelectric sensor arrays. In this three-year project, first we will focus on developing individual flexible oxide-TFT-based amplifiers for piezoelectric sensing application, and the corresponding amplifier circuit performance, in particular the dynamic characteristics, under the influence of mechanical strain/deformation will be studied. Two types of amplifiers will be implemented, including (i) self-bias feedback pseudo-CMOS amplifiers based on n-channel MgZnO or HfZnO TFTs and (ii) CMOS amplifiers based on n-channel ZnO and p-channel SnO TFTs. The device parameters will be optimized via SPICE simulation. Next, a 5&#61620;5 active-matrix oxide-TFT-based amplifier backplane will be fabricated on a typical 50 or 100 &#61549;m-thick free-standing polymer substrate and then integrated with a polyvinylidene fluoride piezoelectric sensor array via lamination and bonding techniques to demonstrate a flexible tactile sensor surface. At the same time, flexible ZnO/AlN multilayer piezoelectric sensor technology will be developed in parallel for the monolithic integration in the third year. In the last year of the project, we plan to move a step further by developing the tactile sensor surfaces on ultra-flexible polymer substrates (~ 10 &#61549;m) coated on temporary rigid carriers. The tactile sensor surface will be implemented by monolithic integration of active-matrix oxide-TFT-based amplifier backplane with the ZnO/AlN multilayer piezoelectric sensors via vacuum deposition. After the fabrication process completes, the ultra-flexible sensor surface will be mechanically released from the hosting support, and its performance will be evaluated when mounted onto curved surface with various curvatures.互補式氧化物薄膜電晶體技術可撓性電子可撓性壓電感測可撓性主動式陣列放大電路complementary oxide thin-film transistor technologyflexible electronicsflexible piezoelectric sensorflexible electronicsflexible piezoelectric sensorflexible active-matrix amplifier backplane