In-situ lateral confocal microscopic surface profilometry with vibration-resistance capability

Chen, L.-C.L.-C.ChenLi, C.-K.C.-K.LiChang, Y.-W.Y.-W.ChangLIANG-CHIA CHEN2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/447863In-situ lateral confocal microscopic surface profilometry with vibration-resistance capabilityconference paper10.1117/12.8855652-s2.0-79952772679https://www.scopus.com/inward/record.uri?eid=2-s2.0-79952772679&doi=10.1117%2f12.885565&partnerID=40&md5=fbfc49d67d13e02d3ebe99cc3c9ac871