A wideband electrostatic microwave switch fabricated by surface micromachining

Chang, C.C.ChangDai, C.-L.C.-L.DaiChen, J.-Y.J.-Y.ChenChen, H.H.ChenYen, K.K.YenChiou, J.-H.J.-H.ChiouPEI-ZEN CHANG2020-04-282020-04-282000https://scholars.lib.ntu.edu.tw/handle/123456789/486860A wideband electrostatic microwave switch fabricated by surface micromachiningjournal article10.1080/02533839.2000.96705992-s2.0-0034316018https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034316018&doi=10.1080%2f02533839.2000.9670599&partnerID=40&md5=124f61420e82a4a366048da02d39f21f