Development of an automated optical inspection system for rapidly and precisely measuring dimensions of embedded microchannel structures in transparent bonded chips

Chen P.-C.Lin Y.-T.Truong C.-M.PAI-SHAN CHENChiang H.-K.2022-03-092022-03-0920211424-8220https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099691727&doi=10.3390%2fs21030698&partnerID=40&md5=7ea798cdc4106aa77fb59ff74d9ac3e9https://scholars.lib.ntu.edu.tw/handle/123456789/596776[SDGs]SDG3Development of an automated optical inspection system for rapidly and precisely measuring dimensions of embedded microchannel structures in transparent bonded chipsletter10.3390/s21030698334984372-s2.0-85099691727