Lars MönchArgon ChenAndy (Myoungsoo) HamJames Morrison2020-03-022020-03-022015https://scholars.lib.ntu.edu.tw/handle/123456789/467232Applications of quantitative methods in semiconductor manufacturingother10.1016/j.cor.2014.08.0032-s2.0-84912142883https://www.scopus.com/inward/record.uri?eid=2-s2.0-84912142883&doi=10.1016%2fj.cor.2014.08.003&partnerID=40&md5=858302139b28eb522a534f17268b21f8