Hong, Chi-TsungChi-TsungHongLI-AN CHUChiang, Ann-ShynAnn-ShynChiangFang, WeileunWeileunFang2026-03-242026-03-242009https://www.scopus.com/inward/record.uri?eid=2-s2.0-65949089183&doi=10.1109%2FMEMSYS.2009.4805329&partnerID=40&md5=01a2f72557d55fa76f580c0a19fc6079https://scholars.lib.ntu.edu.tw/handle/123456789/73669122nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 25 January 2009 through 29 January 2009, SorrentoThis study reports the integration ofnano-texture electrode and self-assembly anodic aluminum oxide (AAO) dielectric layer on Si-substrate for capacitive-type micro tactile sensing devices. The advantages of these nano-structure micro devices are as follows, (1) employing AAO as dielectric film for its large dielectric constant (2.5-fold higher than oxide), and high electrical resistance; and (2) employing the AAO with nanoporous as template to form the nano-texture on metal electrode film to increase sensing area. Thus, the sensitivity of tactile sensor is increased. In application, the MOS (Au-AAO-Si) and the parallel-plate (Au-AAO-Ti) capacitors are fabricated on Si-substrate and then characterized. These two capacitors also show their capability as a tactile sensing device for tiny objects by detecting the contact of Drosophila and ant. ©2009 IEEE.conference paper10.1109/MEMSYS.2009.48053292-s2.0-65949089183