Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning

Wu, Jim-WeiJim-WeiWuYi-Ting LinYu-Ting LoWei-Chih LiuKuang-Yao ChangDa-Wei LiuLi-Chen FuLI-CHEN FU2019-10-312019-10-31201610834435https://scholars.lib.ntu.edu.tw/handle/123456789/429576Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanningjournal article10.1109/tmech.2016.25777392-s2.0-84983550846