Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems

Yu, Chun-ChangChun-ChangYuLin, Pei-ChunPei-ChunLinLu, Yi-ChangYi-ChangLuPEI-CHUN LINCHUNG-PING CHEN2020-01-132020-01-1320181932-5150https://scholars.lib.ntu.edu.tw/handle/123456789/448070Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systemsjournal article10.1117/1.JMM.17.3.031202https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-17/issue-03/031202/Cost-effective-and-channel-scalable-hardware-decoders-for-multiple-electron/10.1117/1.JMM.17.3.031202.full