Arthur TayWeng-Khuen HoNi HuChoon-Meng KiewKuen-Yu TsaiKUEN-YU TSAI2018-09-102018-09-102007-03http://scholars.lib.ntu.edu.tw/handle/123456789/333764Real-time spatial control of photoresist development rateconference paper10.1117/12.7115092-s2.0-35148837580