Error Analysis for Diffraction Grating Interferometric Stylus Probing System

Fan, K.C.K.C.FanSu, C.D.C.D.SuMou, J.I.J.I.Mou2008-11-182018-06-282008-11-182018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/86560application/pdf282685 bytesapplication/pdfen-USError Analysis for Diffraction Grating Interferometric Stylus Probing Systemjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86560/1/16.pdf