國立臺灣大學電機工程學系暨研究所詹國禎2006-07-252018-07-062006-07-252018-07-062004-07-31http://ntur.lib.ntu.edu.tw//handle/246246/7996本計劃以半導體微製程技術及其他微機電的技術，以矽晶片為基座材料，設 計與製作數種幾何形狀，寬深，及結構不同的微流體晶片，藉由晶片上的儲存槽 及微流道，將微量體積的DNA 溶液置入其中，外加電極電壓以驅使流體中的帶 電分子或離子流動，再利用儀器量測離子電流與電壓，電流與時間的關係曲線， 嘗試由微流道中離子電流的差異性來分辨不同的分子片段，配合理論模型以探討 不同的DNA 片段的差異性，建立起一套有別於一般光學量測的電性量測系統， 並且將更進一步切入微奈米結構與生醫微分子的交互作用研究。The objective of the study is to setup the Fabrication process of the microfluid devices and study of the electrical characterization in biomolecular aqueous solution. We use the process of the silicon semiconductor and the MEMS techniques on silicon wafer, and make different microchannels on it. By loading a small amount of DNA reagents in the microchannel and applying Voltage on the both side of the microchannel, the variation of the current of DNA aqueous solutions was carried out and detected. In the process of the Fabrication, we attempt some different methods to product etching mask and confer their quality for wet etching process. We also use wet etching and dry etching method to make the microchannel,and fabricate three chips with its particular purpose. Furthermore, the curve of current versus voltage and the curve of current versus time were recorded precisely in time by a high-resolution measurement system. With these results, we discover the distinct divergences in different DNA reagents. It was successfully to distinguish the reagents as dGTP, dATP, dTTP, dCTP.application/pdf244331 bytesapplication/pdfzh-TW國立臺灣大學電機工程學系暨研究所微流道矽晶片DNA電性量測系統微奈米結構與生醫微分子的交互作用microchannelsilicon waferhigh-resolution measurement systemreporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/7996/1/922218E002039.pdf