Yang, ZhiKaiZhiKaiYangLee, WCWCLeeChang, PenPenChangHuang, MoLinMoLinHuangHuang, Yi LinYi LinHuangMINGHWEI HONGHuang, CMCMHuangHsu, CHCHHsuKwo, RaynienRaynienKwo2018-09-102018-09-102006http://scholars.lib.ntu.edu.tw/handle/123456789/323215Cubic HfO2 Doped with Y2O3 for Advanced Gate Dielectrics by MBE.conference paper