Comparison of the piezoelectric energy harvesters with Si- MEMS and metal-MEMS

Wu, W.J.W.J.WuChen, C.T.C.T.ChenLin, S.C.S.C.LinKuo, C.L.C.L.KuoWang, Y.J.Y.J.WangYeh, S.P.S.P.YehWEN-JONG WU2020-01-172020-01-172014https://scholars.lib.ntu.edu.tw/handle/123456789/451981Comparison of the piezoelectric energy harvesters with Si- MEMS and metal-MEMSconference paper10.1088/1742-6596/557/1/0120272-s2.0-84915749194https://www.scopus.com/inward/record.uri?eid=2-s2.0-84915749194&doi=10.1088%2f1742-6596%2f557%2f1%2f012027&partnerID=40&md5=445d91c5c11881d819863b7c5b428d25