Plastic-fiber-bundle-based metrology for two-dimension mapping the dissolution rate of photoresist film

Lin, Gong-RuGong-RuLinGONG-RU LIN2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0032597043&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350187Plastic-fiber-bundle-based metrology for two-dimension mapping the dissolution rate of photoresist filmconference paper