The Effect of Patterned Susceptor on the Thickness Uniformity of Rapid Thermal Oxides

Lee, Kuo-ChungKuo-ChungLeeChang, Hong-YuanHong-YuanChangChang, HongHongChangHwu, Jenn-GwoJenn-GwoHwuWung, Tzong-ShyanTzong-ShyanWung2009-01-212018-06-292009-01-212018-06-291999-08http://ntur.lib.ntu.edu.tw//handle/246246/107105application/pdf165711 bytesapplication/pdfen-USThe Effect of Patterned Susceptor on the Thickness Uniformity of Rapid Thermal Oxideshttp://ntur.lib.ntu.edu.tw/bitstream/246246/107105/1/02.pdf