Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approach

Dept. of Comput. Sci. & Inf. Eng., National Taiwan Univ.Lin, Ming-HungMing-HungLinFu, Li-ChenLi-ChenFu2007-04-192018-07-052007-04-192018-07-051999-10http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021569application/pdf595748 bytesapplication/pdfen-US[SDGs]SDG9Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approachjournal article10.1109/ICSMC.1999.823325http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021569/1/00823325.pdf