Design Criteria for a Push-On Push-Off MEMS Bistable Device

Huang, H.-W.H.-W.HuangLee, F.-W.F.-W.LeeYang, Y.-J.J.Y.-J.J.YangYAO-JOE YANG2020-01-132020-01-132016https://scholars.lib.ntu.edu.tw/handle/123456789/448459[SDGs]SDG7Design Criteria for a Push-On Push-Off MEMS Bistable Devicejournal article10.1109/JMEMS.2016.25748742-s2.0-84981738030https://www.scopus.com/inward/record.uri?eid=2-s2.0-84981738030&doi=10.1109%2fJMEMS.2016.2574874&partnerID=40&md5=0f9363d93f82dcff41d5131b05f0ff55