指導教授：傅立成臺灣大學：電機工程學研究所吳俊緯Wu, Jim-WeiJim-WeiWu2014-11-282018-07-062014-11-282018-07-062013http://ntur.lib.ntu.edu.tw//handle/246246/262954原子力顯微鏡是一種非常有用的精密量測儀器，此儀器具有奈米等級的解析能力並適用於導體與非導體樣本且不受使用環境所限制，為目前不可或缺的微奈米量測工具。然而，傳統原子力顯微鏡所使用的掃描方式，在軌跡上容易造成掃描器的機械共振問題，且無法去除不必要的掃描區域，因此，對於一個大範圍與高解析度的影像要求，必須要以一個更長的掃描時間來達成，無法給予一個有效率的掃描表現，為目前原子力顯微鏡應用上的主要缺陷。在本論文中， 將以自行開發之原子力顯微鏡系統從三個不同的層面來克服上述問題。 首先，我們採用順滑式利薩茹軌跡並搭配適合此軌跡的先進控制法則，可在不引起水平掃描器震動的情況下提高掃描速率與精度。其次，針對此順滑軌跡的路徑特徵，撰寫掃描路徑演算法則，並利用探針橫過樣本後迴授的高度資訊去除不必要的掃描區域，藉此減少掃描所需時間。 最後，考慮樣本表面形貌的變化情形，在表面劇烈變化的地方提供一個更高解析度的掃描，藉此改善掃描影像的品質，從實際的掃描應用可以證實上述方法之效果。Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro/nano scale measurement tool. However, because the raster scan method of the conventional AFM could easily induce the mechanical resonance of the scanner and cannot remove the scan area which is not our interest. Under a requirement for a large range and high resolution sample image which however needs excessive scan time, how to overcome such hurdles becomes the main challenge for AFM applications. In this thesis, we try to approach and resolve these problems with self-designed AFM system from three aspects. First, we use a smooth Lissajous scan trajectory, and apply an advanced controller to realize this kind of trajectory. Since vibration of the lateral scanner will not be induced easily, the scan rate and scan accuracy can thus be increased accordingly. Next, based on the path characteristics of the smooth Lisajous trajectory, we propose a suitable scan algorithm, which initially employs the information on the sample height which the probe is traversing the scan area, and them select the sub-areas of our interest for next phase scan. Overall, such two phase scan reduce the scan time. Finally, considering the varying of sample topography, we provide higher resolution scan on the severe area to improve the scan performance so that a better scan image can be obtained. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired.摘要 i Abstract ii Table of Content iv Table of Acronyms vii List of Figures viii List of Tables xii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Survey 3 1.2.1 Large range AFM 3 1.2.2 High speed AFM 6 1.2.3 Local scan AFM 10 1.3 Contribution 13 1.4 Thesis Organization 15 Chapter 2 Preliminary 17 2.1 Fundamentals of Electromagnetic Actuation 17 2.1.1 Lorentz force principle 18 2.1.2 Properties of permanent magnet 19 2.2 Fundamentals of Piezoelectric Actuation 23 2.2.1 Piezoelectric effect 23 2.2.2 Hysteresis phenomenon 24 2.3 Basic Principles of CD/DVD Pickup Head 26 2.3.1 Sensing metrodology 28 2.3.2 Focusing and tracking actuator 30 2.4 Operation Principle of AFM System 31 2.5 Internal Model Principle (IMP) 34 Chapter 3 System Design and Dynamic Modeling 37 3.1 AFM Measuring System 38 3.1.1 Probe oscillating system 39 3.1.2 Probe dynamic detection 41 3.2 AFM Scanning System 42 3.3 Dynamic Modeling and Formulation 44 3.3.1 Modeling od xy-hybrid scanner 45 3.3.2 AFM scanning disturbance 50 3.3.3 System identification 54 3.4 Laser Interferometer Sensing System 58 3.5 Hardware Equipments 60 Chapter 4 Lissajous Hierarchical Local Scan (LHLS) 63 4.1 Scan Trajectory Analysis 64 4.1.1 Conventional raster scan trajectory 65 4.1.2 Smooth Lissajous scan trajectory 67 4.2 Lissajous Scan Trajectory Formulation 68 4.2.1 Trajectory fundamental principle 68 4.2.2 Mapping Lissajous points to raster points 73 4.3 Lissajous Hierarchical Local Scan Algorithm 76 4.3.1 First layer scan 78 4.3.2 Second or higher layer scan 84 Chapter 5 Controller Design 89 5.1 Scan Trajectory Assignment for xy-Hybrid Scanner 89 5.2 IMP based Adaptive Complementary Sliding Mode Control 91 5.2.1 Problem formulation 92 5.2.2 Control algorithm 94 5.2.3 Stability analysis 97 5.3 IMP based Neural Network Complementary Sliding Mode Control 103 5.3.1 Problem formulation 104 5.3.2 Control algorithm 107 5.3.3 Stability analysis 110 Chapter 6 Experiments 115 6.1 Experimental Setup 115 6.2 Hysteresis Compensation 117 6.3 Scan Trajectory Tracking 118 6.3.1 Triangular waveform with PI control 118 6.3.2 Cosine waveform with PI control 120 6.3.3 Cosine waveform with IMP based NNCSMC 121 6.4 Numerical Simulation of Lissajous Hierarchical Local Scan 123 6.5 AFM Scanning Application 129 6.5.1 Standard Grating with Raster Scan 129 6.5.2 Standard Grating with Lissajous Scan 131 6.5.3 Human blood cells with Lissajous Hierarchical Local Scan 133 Chapter 7 Conclusions 139 Reference 141 List of Publication 1465258122 bytesapplication/pdf論文公開時間：2017/01/27論文使用權限：同意無償授權原子力顯微鏡利薩茹掃描軌跡內部模型原理互補式順滑模式控制類神經網路適應性控制thesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/262954/1/ntu-102-D96921004-1.pdf