Development and performance study of a magnetic-aerostatic vibration isolation platform

Chang, K.-N.K.-N.ChangHuang, K.-Y.K.-Y.HuangKUANG-YUH HUANG2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/447749Development and performance study of a magnetic-aerostatic vibration isolation platformconference paper10.1117/12.9171002-s2.0-84861507901https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861507901&doi=10.1117%2f12.917100&partnerID=40&md5=1d77d6a3fe861dc5578c608587c11f1e