Robust controller design for an electron beam projection lithography system

Wang, Fu-ChengFu-ChengWangHong, Min-FengMin-FengHongHsieh, Chin-HuiChin-HuiHsieh2013-02-062018-06-282013-02-062018-06-282009http://ntur.lib.ntu.edu.tw//handle/246246/246701en-USRobust controller design for an electron beam projection lithography systemconference paper