Design and control of a long-stroke nano-positioning stage

Wu, R.C.R.C.WuTsai, I.H.I.H.TsaiWang, F.C.F.C.WangYen, J.Y.J.Y.YenJIA-YUSH YEN2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84902506113&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/377702Design and control of a long-stroke nano-positioning stageconference paper2-s2.0-84902506113