2008-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/694300摘要：本研究主要的目標，將開發出可撓式觸覺與剪應力感測陣列，並將展示其可用於機器人上之人工皮膚。首先，我們提出一創新之高敏感電容式感測器之結構的設計。這個新式的設計，除了製造程序簡易，更具有高可靠度的特性。在研究中，所開發出的人工皮膚是利用微製程技術所製造而成。其組成是由PI基材及聚二甲基矽氧烷（PDMS）層所構成。PDMS層接合於已定義電極圖形之PI基材，來作為於電容式感測陣列當中觸覺與剪應力感測元件。PDMS的成型是由SU-8厚膜光阻之母模所翻模而成。而PI基材上的雙層金屬導線及感測電極則由微蝕刻的方式所製作完成。電容式感測器利用量測聚二甲基矽氧烷薄膜變形，來感測施加外力變化。在每一個剪應力感測器當中，則有四個電容感測器，能夠將接觸力轉換成正向壓力或剪應力。然而，為了能精準感測剪應力變化，剪應力感測單元的凸塊與觸覺感測器之間的支撐圓柱亦是元件設計的重要考量。感測陣列中，亦將使用少量的溫度感測晶片來感測皮膚周遭的環境溫度。研究中亦將開發相關的掃描讀取電路，並架構量測平台以對人工皮膚的各項特性做探討。針對機器人的應用，不同人工皮膚之陣列大小與感測器種類，亦將根據實際的應用作探討。另外，本計劃亦將開發各感測器陣列所需的掃瞄讀取電路。<br> Abstract: Recently, the development of humanoid robots has received significant attention. In order to ensure effective and safe interactions between robots and humans, intelligent sensing capabilities for robots are critical. Therefore, this requirement has boosted the demand of artificial skins in robotics research field. The primary purposes of artificial skins are to realize the information exchange between robots and human beings as well as environment, and to serve as the sensing systems to avoid damages to humans or robots. The basic sensing capabilities of an artificial skin include the sense of touch, the sense of temperature, and so on. For a typical artificial skin, a large number of sensing elements, such as tactile sensors and temperature sensors, are required to be implemented on a sheet-like flexible structure of about few hundred cm2 area. In this work, we will develop a flexible capacitive tactile and shear-stress sensing array, which will serve as the artificial skin for robot applications. A novel design of high-sensitive capacitive sensor structures is proposed. The design is highly reliable and highly manufacturable. The proposed artificial skin is fabricated by using micromachining techniques. A novel method for fabricating tactile and shear-stress sensing element is proposed. Each tactile sensing element consists of two parallel-plate capacitors with a common electrode. This design can effectively reduce the complexity of the capacitor structure of each sensing element. Also, because of the elimination of long metal interconnects on the flexible PDMS layers, the reliability of the device can be greatly enhanced. The design of capacitor structure for the shear-stress sensing element is also similar to the structure of the tactile sensing element, while the top surface of the shear-sensing elements will embedded with tiny bumps which significantly improve the performance of shear-stress sensing. The corresponding scanning circuit for each sensing array will also be designed and implemented. Furthermore, the developed artificial skins will also be deployed on the robots developed in this integrated project. Many configurations of the skins, such as array sizes, skin sizes and sensor types, will be designed and implemented according to the robot applications. For example, high-resolution and small-area skins will be used for the fingers of the robot, while large-size skins will be used for robot trunks or arms. Also, shear-stress sensing skins will be deployed on the fingers to test the gripping capability of robot hands.人工皮膚電容感測壓力感測陣列剪應力感測陣列artificial skincapacitive sensingtactile sensing arrayshearing stress sensing array