Characterization of reactively r.f.-sputtered tantalum oxide films

Tu, Yuan-KuangYuan-KuangTuLin, Chia-ChienChia-ChienLinWang, Way-SeenWay-SeenWangHuang, Sheng-LiangSheng-LiangHuang2009-03-252018-07-062009-03-252018-07-061988http://ntur.lib.ntu.edu.tw//handle/246246/147878application/pdf350845 bytesapplication/pdfen-USCharacterization of reactively r.f.-sputtered tantalum oxide filmsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/147878/1/02.pdf