Compact MEMS/NEMS characterization platform using a DVD optical pick-up unit with optical imaging function

Chen, C.-H.C.-H.ChenLarsen, P.E.P.E.LarsenSchmid, S.S.SchmidLiao, H.-S.H.-S.LiaoHuang, K.-Y.K.-Y.HuangHwang, I.-S.I.-S.HwangBoisen, A.A.BoisenHwu, E.-T.E.-T.HwuHSIEN-SHUN LIAO2020-01-132020-01-132013https://scholars.lib.ntu.edu.tw/handle/123456789/447517Compact MEMS/NEMS characterization platform using a DVD optical pick-up unit with optical imaging functionconference paper2-s2.0-84881100468https://www.scopus.com/inward/record.uri?eid=2-s2.0-84881100468&partnerID=40&md5=db0b36f46ef488f5101e3f0b79aac80f