Linear diffraction grating interferometer with high alignment tolerance and high accuracy

Cheng, FangFangChengFan, Kuang-ChaoKuang-ChaoFan2012-10-312018-06-282012-10-312018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/244129en-US[SDGs]SDG7Linear diffraction grating interferometer with high alignment tolerance and high accuracyjournal article10.1364/AO.50.004550http://ntur.lib.ntu.edu.tw/bitstream/246246/244129/-1/205.pdf