Interfacial Reactions of r.f-Sputtered TiNi Thin Film on (100) Silicon with SiN Diffusion-Barrier

Wu, S.K.S.K.WuSu, J.J.J.J.SuWang, J.Y.J.Y.Wang2011-02-112018-06-282011-02-112018-06-282004-12http://ntur.lib.ntu.edu.tw//handle/246246/222114en-USInterfacial Reactions of r.f-Sputtered TiNi Thin Film on (100) Silicon with SiN Diffusion-Barrierjournal article