Lu, Yuan-ToYuan-ToLuLin, Wei-ChenWei-ChenLinLu, Ssu-YunSsu-YunLuHo, Ming-HsuanMing-HsuanHoWang, Chin-YangChin-YangWangSHAO-PU TSAILiu, Chun-TingChun-TingLiuLin, Chia-YuChia-YuLinYong, Yu-Yan AuYu-Yan AuYongChang, Kai-HaoKai-HaoChangLee, Ya-Ti ChangYa-Ti ChangLeeLin, Yen-HsiangYen-HsiangLinHuang, Haw-TyngHaw-TyngHuangChen, Chia-HsunChia-HsunChen2026-04-212026-04-2120259781957171500https://www.scopus.com/record/display.uri?eid=2-s2.0-105033331429&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/737358Fluxonium superconducting qubits have been fabricated on sapphire substrates using an e-beam lithography-based Dolan Bridge technique. To enhance process control and improve yield, the quantum circuit fabrication is monitored through a non-destructive, in-line X-ray metrology method.falseconference paper10.1364/cleo_at.2025.ps200_852-s2.0-105033331429