Infrared studies of laser induced oxide on (1 0 0) Si and SiGe layers

Liu, C. W.C. W.LiuHuang, Y. S.Y. S.HuangChen, C. Y.C. Y.ChenGurtler, S.S.GurtlerYang, C. C.C. C.YangChang, Y.Y.ChangChen, L. P.L. P.ChenLiuCW2009-03-252018-07-062009-03-252018-07-062000http://ntur.lib.ntu.edu.tw//handle/246246/148151application/pdf112021 bytesapplication/pdfen-USInfrared studies of laser induced oxide on (1 0 0) Si and SiGe layersjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/148151/1/12.pdf