Choquette, Kent DKent DChoquetteFreund, RSRSFreundMINGHWEI HONGLuftman, HSHSLuftmanChu, SNGSNGChuMannaerts, JPJPMannaertsWetzel, RCRCWetzel2018-09-102018-09-101993http://scholars.lib.ntu.edu.tw/handle/123456789/302763Hydrogen plasma processing of GaAs and AlGaAsjournal article