Effect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructures

Y.-J. YangM. GretillatS. D. Senturia,S. D. SenturiaYAO-JOE YANG2021-11-252021-11-251997https://scholars.lib.ntu.edu.tw/handle/123456789/587827ChicagoEffect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructuresconference paperhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-0030715786&partnerID=40&md5=d6258b6edd57d644bcea711906c54b082-s2.0-0030715786