Sidewall smoothing for Si/SiO2 waveguides by excimer laser reformation

Hung, S.-C.S.-C.HungLiang, E.-Z.E.-Z.LiangCHING-FUH LIN2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-51249115804&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332075Sidewall smoothing for Si/SiO2 waveguides by excimer laser reformationconference paper10.1109/CLEOE-IQEC.2007.4386517