K.-H. Lin,K.-H. LinC.-T. Yu,C.-T. YuS.-Z. Sun,S.-Z. SunH.-P. Chen,H.-P. ChenC.-C. Pan,C.-C. PanJ.-I. Chyi,J.-I. ChyiS.-W. Huang,S.-W. HuangPAI-CHI LICHI-KUANG SUN2018-09-102018-09-102006-0100036951http://scholars.lib.ntu.edu.tw/handle/123456789/325811https://www.scopus.com/inward/record.uri?eid=2-s2.0-33746610251&doi=10.1063%2f1.2234723&partnerID=40&md5=c39d0f14e1373161a35956a3b0eb5c9dTwo-dimensional ultrasonic imaging is demonstrated by using acoustic nanowaves. With a 14 nm acoustic wavelength, both axial and transverse resolutions of a few tens of nanometers are thus achieved. This ultrasonic-based nondestructive technique not only images but also reconstructs the subsurface nanostructures including the depth positions of the buried interfaces. By demonstrating two-dimensional nanoultrasonic scans in depth and transverse (or z-x) axes, we show that acoustic nanowaves can be a promising tool for future subsurface three-dimensional noninvasive imaging with nanometer resolutions. © 2006 American Institute of Physics.Acoustic waves; Interfaces (materials); Nondestructive examination; Optical resolving power; Acoustic nanowaves; Nanoultrasonic scans; Noninvasive imaging; Ultrasonic imagingjournal article10.1063/1.22347232-s2.0-33746610251WOS:000239376500097