Young's modulus of high aspect ratio Si3N4 nano-thickness membrane

Chen, P.-H.P.-H.ChenYang, C.-H.C.-H.YangTsai, C.-Y.C.-Y.TsaiChang, T.-L.T.-L.ChangHsu, W.-C.W.-C.HsuPING-HEI CHEN2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-52949144254&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/330402Young's modulus of high aspect ratio Si3N4 nano-thickness membranejournal article10.1109/NANO.2007.4601367