Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO<inf>3</inf> on GaAs(111)A Using Laminated Atomic Layer Deposition

Young, L.B.L.B.YoungCHIA-KUEN CHENGLin K.-YLin Y.-HWan H.-WCai R.-FLo S.-CLi M.-YHsu C.-HKwo JMINGHWEI HONG2021-07-282021-07-282019https://www.scopus.com/inward/record.url?eid=2-s2.0-85063910737&partnerID=40&md5=8cd1ba790aecfd95455fa452e9cf8485https://scholars.lib.ntu.edu.tw/handle/123456789/573738Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO<inf>3</inf> on GaAs(111)A Using Laminated Atomic Layer Depositionjournal article10.1021/acs.cgd.8b013752-s2.0-85063910737