Wu, Zhao-KaiZhao-KaiWuChen Mei-YungHung Shao-KangHuang Sheng-ChihLI-CHEN FU2010-12-102018-07-062010-12-102018-07-06200607431546http://ntur.lib.ntu.edu.tw//handle/246246/220762https://www.scopus.com/inward/record.uri?eid=2-s2.0-39649092974&doi=10.1109%2fcdc.2006.377024&partnerID=40&md5=70e09c0ef2427d169e71272d09dac22bIn this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results. ©2006 IEEE.en-USAdaptive controller; Parallel flexure mechanism; Positioner; Precision positioningActuators; Control equipment; Eddy currents; Electromagnetic field effects; Robust control; Sliding mode control; Adaptive controllers; Electromagnetic actuators; Parallel flexure mechanism; Precision positioning; Degrees of freedom (mechanics)conference paper10.1109/cdc.2006.3770242-s2.0-39649092974