Toshiyoshi, H.H.ToshiyoshiLaCosse, J.J.LaCosseWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-102003http://www.scopus.com/inward/record.url?eid=2-s2.0-0042888683&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/303141This paper presents the design, fabrication, and operation of a newly developed micromechanical optical scanner array using a translating microlens. We have used photoresist reflow technique to form a microlens on a surface micromachined XY-stage of the scratch-drive actuation mechanism. The lens scanner is placed at the focal length from an incident optical fiber to collimate the transmitting light. The collimated beam is steered two-dimensionally by the XY-motion of the microlens with respect to the incident fiber. We also have developed a theoretical model to predict appropriate initial resist thickness and diameter for the scanning lens. An optical scanning angle of ±7° has been demonstrated by sliding a microlens of 670-μm focal length at a physical stroke of ±67 μm. Typical angular positioning resolution has been estimated to be 0.018°.Microactuator; Microlens; Optical scanner; Photoresist reflow technique; XY-stageMathematical models; Microlenses; Optical fibers; Optical switches; Photoresists; Thickness measurement; Wavelength division multiplexing; Optical scanning angle; Photoresist lenses; Thermal reflow process; Optical devicesjournal article10.1109/JLT.2003.8143992-s2.0-0042888683