A Highly Sensitive Capacitive Pressure Sensor with Microdome Structure for Robot Tactile Detection

Wang, S.S.WangHuang, K.-H.K.-H.HuangYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132019https://scholars.lib.ntu.edu.tw/handle/123456789/448439A Highly Sensitive Capacitive Pressure Sensor with Microdome Structure for Robot Tactile Detectionconference paper10.1109/TRANSDUCERS.2019.88085832-s2.0-85071922158https://www.scopus.com/inward/record.uri?eid=2-s2.0-85071922158&doi=10.1109%2fTRANSDUCERS.2019.8808583&partnerID=40&md5=e4978248f4ff94f7f294aab015b00c33