Thin zoom camera module by large-stroke micromachined deformable mirrors

Huang, Y.-H.Y.-H.HuangLin, Y.-H.Y.-H.LinGUO-DUNG JOHN SU2020-06-112020-06-112012https://scholars.lib.ntu.edu.tw/handle/123456789/501717[SDGs]SDG7Thin zoom camera module by large-stroke micromachined deformable mirrorsconference paper10.1117/12.9296582-s2.0-84872872326https://www.scopus.com/inward/record.uri?eid=2-s2.0-84872872326&doi=10.1117%2f12.929658&partnerID=40&md5=6eaf1b4842b43fdbe33ce16a8c72f34e