Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA

Chang, J.H.-C.J.H.-C.ChangChen, C.C.-P.C.C.-P.ChenMelvin, L.S.L.S.MelvinCHUNG-PING CHEN2020-06-112020-06-112010https://scholars.lib.ntu.edu.tw/handle/123456789/501080[SDGs]SDG9Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCAconference paper10.1117/12.8466152-s2.0-79959230545https://www.scopus.com/inward/record.uri?eid=2-s2.0-79959230545&doi=10.1117%2f12.846615&partnerID=40&md5=ed50f3c649f5d67b7cf329812a014f6f