SiC and Si Quantum Dots Co-Precipitated Si-Rich SiC Film with n- and p-Type Dopants Grown by Hydrogen-Free PECVD

Tai, Hung-YuHung-YuTaiLee, Chiao-TiChiao-TiLeeTsai, Lin-HsuanLin-HsuanTsaiLin, Yung-HsiangYung-HsiangLinPai, Yi-HaoYi-HaoPaiWu, Chih-I.Chih-I.WuCHIH-I WUGONG-RU LIN2020-06-112020-06-1120132162-8769https://scholars.lib.ntu.edu.tw/handle/123456789/498015[SDGs]SDG6SiC and Si Quantum Dots Co-Precipitated Si-Rich SiC Film with n- and p-Type Dopants Grown by Hydrogen-Free PECVDjournal article10.1149/2.002309jssWOS:000321620800002