2013-01-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/675648摘要：我們已經開發出一個教育版原子力顯微術系統(AFM)系統運用了新開發的鎢針尖，並已經完成驗證。鎢電極尖是很好的導電也可以使用於掃描穿隧式顯微鏡（STM）上。因此，我們開始一個新的構想概念來發展一種混合式掃描探針顯微術SPM系統，結合了原子力顯微術和掃描穿隧式顯微術的功能。以體積緊湊的像散式讀取頭(ADS）為基礎，不同尺寸的原子力顯微術探針懸臂可以被很好地整合起來，來擴大其應用範圍。為了能夠容易且精確地裝置不同尺寸的原子力顯微術探針懸臂到像散式讀取頭ADS裝置上，我們必須為商用探針和鎢探針設計開發出高可靠度精密的固定模組。<br> Abstract: An educational AFM system with our new-developed tungsten tip has been achieved and well verified. The tungsten tip is also well conductive and can be also used in scanning tunnelling microscopy (STM). Therefore, we initiate a novel concept to develop a hybrid SPM system combined with AFM and STM functions. Base on the compact astigmatic detection system (ADS), different AFM-cantilever can be well integrated to widen the scope of application. For easily setting up diverse AFM-cantilevers precisely into the ADS-device, we also need to design and develop a reliable and precision attachment module for both commercial tip and tungsten tips.奈米科技原子力顯微術掃描穿隧式顯微術鎢探針NanotechnologyAFMSTMTungsten tip