Combined Raman and luminescence assessment of epitaxial 6H-SiC films grown on 6H-SiC by low pressure vertical chemical vapor deposition

Feng, Z.C.Z.C.FengTin, C.C.C.C.TinHu, R.R.HuYue, K.T.K.T.Yue2010-09-022018-07-052010-09-022018-07-051995-01http://ntur.lib.ntu.edu.tw//handle/246246/193671en-USCombined Raman and luminescence assessment of epitaxial 6H-SiC films grown on 6H-SiC by low pressure vertical chemical vapor depositionjournal article