The demonstration of dislocation-stress memorization technique stressor on Si n-FinFETs

M. H.LiaoP.-G. Chen2019-03-112019-03-112015https://scholars.lib.ntu.edu.tw/handle/123456789/404502[SDGs]SDG7The demonstration of dislocation-stress memorization technique stressor on Si n-FinFETsjournal article10.1109/TNANO.2015.24286982-s2.0-84939788628