A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition method

Gong, X.X.GongChen, C.-T.C.-T.ChenWu, W.-J.W.-J.WuLiao, W.-H.W.-H.LiaoWEN-JONG WU2020-01-172020-01-172019https://scholars.lib.ntu.edu.tw/handle/123456789/451950A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition methodconference paper10.1117/12.25142242-s2.0-85068327310https://www.scopus.com/inward/record.uri?eid=2-s2.0-85068327310&doi=10.1117%2f12.2514224&partnerID=40&md5=abbd6ef0f85fd2d4d87df2fddcfc3332